Process Integration aspects of back illuminated CMOS Imagers using Smart Stacking Technology with best in class direct bonding
R. Shima Edelstein; O.Katz, B.Lavi, I. Aberman., S. Rosenthal., M. Shadmi., S,Arad., Nili Golan, M. Shach Caplan, and M. Massalha. C. Lagahe-Blanchard., L.Marinier, R. Fontanière., A. Castex., M. Broekaart., M.Martinez., N.Milhet., A.Rigny2, C. Pelissier. 2011 International Image Sensor Workshop (IEEE), June 8-11, 2011, Hokkaido, Japan. Pages 240-243.